Automated Analysis of Semiconductor-Grade Hydrofluoric Acid with prepFAST S and NexION 5000 ICP-MS
This work presents the fully automated analysis of undiluted semiconductor-grade HF using PerkinElmer’s NexION 5000 ICP-MS working seamlessly with ESI’s prepFAST S ultraclean sample introduction system. The automated dilution and MSA calibration capabilities of the prepFAST S achieved outstanding linearity of the calibration curves for all 42 elements analyzed.