Analysis of Ultra Trace Metallic Impurities in Semiconductor FAB by Online ICP-MS


Due to the high volumes of samples being tested during 24/7 operation, testing solutions must be extremely robust, rapid quality control must be imbedded in the process and mechanisms must be in place to protect the manufacturing process from these contaminates. Semiconductor testing solutions must also be flexible and forward thinking enough to integrate with online contamination detection systems  and software in order to automatically alter production environments and alert lab personnel to impurities being introduced during fabrication phases.