Airborne Molecular Contaminants (AMC) and VOC Detection/Monitoring in Clean Room


There are many sources of airborne molecular contaminants (AMC) in cleanroom during fabrication of semiconductors and electronics and if they are not controlled, they are detrimental to end-product operation. This seminar focuses on molecular condensable analysis by online TD-GC-FID and TD-GCMS techniques to monitor and control target organic compounds in the cleanroom.