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NexION 5000 Multi-Quadrupole ICP Mass Spectrometer

R&D 100 Award winner NexION 5000 ICP-MS

The NexION® 5000 multi-quadrupole ICP-MS – the first in its category to boast four quads – is innovatively designed to meet and exceed the demanding requirements of ultra-trace elemental applications. It takes ICP-MS performance beyond traditional triple quad to deliver exceptionally low background equivalent concentrations and outstanding detection limits, key to ensuring accurate, repeatable results. Plus, the NexION 5000 provides superior interference removal, phenomenal stability and unmatched matrix tolerance, for performance you can rely on.

In addition to boasting four quads, the NexION 5000 is also the proud recipient of three awards: Wiley Analytical Science Award, The Analytical Scientist Innovation Award, and R&D 100 Award.

Part Number
Model Name
Technology Type
NexION 5000 Cleanroom ICP-MS
Multi-Quad ICP-MS for Cleanroom Applications
NexION 5000 Non-Cleanroom ICP-MS
Multi-Quad ICP-MS for Non-Cleanroom Applications
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The NexION 5000 Cleanroom ICP-MS is suitable for cleanroom applications, designed specifically for those requiring the highest level of cleanliness and the lowest background equivalent concentrations (<1 ppt, even in hot plasma). It is equipped with a host of new and proprietary technologies which together surpass traditional triple-quad capabilities and redefine your expectations:

  • Four quadrupoles:
    • First: Quadrupole Ion Deflector (Q0) directs ions to the entrance of the first mass filter
    • Second: Transmission Analyzer Quadrupole 1 (Q1, full-sized for <0.7 amu mass resolution), acts as a mass filter or as an ion guide to direct ions to the Quadrupole Universal Cell
    • Third: Quadrupole Universal Cell (Q2), empowered by dynamic bandpass tuning, prevents side reactions with residual reaction gases in the cell
    • Fourth: Transmission Analyzer Quadrupole 2 (Q3, full-sized for <0.7 amu mass resolution), acts as a mass filter or as an ion guide to direct ions to the detector
  • Extended Dynamic Range (EDR) increases linear dynamic range to 1012, allowing to run both high- and low-concentration analytes in a single analytical run, resulting in fewer re-runs
  • Low maintenance for greater uptime:
    • Triple Cone Interface with patent-pending OmniRing combined with Quadrupole Ion Deflector deliver no maintenance beyond cones, for continual operation and improved stability
    • 34 MHz free-running RF generator offers trouble-free user experience - the plasma is generated by the unique LumiCoil RF load coil, which is passively cooled by the extraction (does not require water or gas cooling), so maintenance-free, eliminating need to replace plasma load coils
  • External status lighting provides easy visibility of state of analysis, optimizing efficiencies
  • Syngistix for ICP-MS software (v. 3.0 or higher) brings together the power of the triple-quad ion optics with automated and user-friendly workflows and a contemporary user interface
  • Certified to be able to be upgraded to meet SEMI S2/S8 (emergency button) delivers ease of integration in cleanroom facilities


Depth 85.0 cm
Height 85.0 cm
Model Name NexION 5000 Cleanroom ICP-MS
Product Brand Name NexION
Technology Type Multi-Quad ICP-MS for Cleanroom Applications
Weight 191.0 kg
Width 114.0 cm
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Application Brief

Automated Analysis of Semiconductor-Grade Hydrofluoric Acid with prepFAST S and NexION 5000 ICP-MS

Hydrofluoric acid (HF) is widely utilized in the semiconductor industry during the cleaning process of silicon wafers in order to reduce contamination by trace metals, particulates, and organic contaminants which would otherwise alter the functionality of the semiconductors. As such, the use of h ...

Automated Analysis of Semiconductor-Grade Nitric Acid with prepFAST S and NexION 5000 ICP-MS

Nitric acid (HNO3) is widely utilized in the semiconductor industry during the cleaning process of silicon wafers to reduce contamination by trace metals, particulates, and organic contaminants which would otherwise alter the functionality of the semiconductors. As such, the use of a h ...

Automated Analysis of Semiconductor-Grade Sulfuric Acid with prepFAST S and NexION 5000 ICP-MS

Sulfuric acid (H2SO4) is used in the semiconductor industry to clean, etch impurities on silicon wafers and strip photoresist during the chip production processes. The reduction of potential contamination on silicon wafers is crucial, as trace-metal, particulate, and organic ...

Automated Analysis of Semiconductor-Grade TMAH with prepFAST S and NexION 5000 ICP-MS

Tetramethylammonium hydroxide (TMAH) is a basic solvent widely utilized in the semiconductor industry for photoresist development and lithography applications. The reduction of potential contamination on silicon wafers during the manufacturing processes is crucial as trace-metal, particulate and ...

Rapid Ultra-Trace Analysis of Impurities in Ultrapure Water using the NexION 5000 ICP-MS

Since ultrapure water (UPW) is used throughout the semiconductor industry in a variety of applications, impurities need to be controlled as these will directly impact the quality and overall yield of semiconductor products. ICP-MS is often used to accurately quantify sub-ppt concentrations of imp ...

Ultra-Trace Determination of Non-Metallic Elements in Dilute Nitric Acid Using NexION 5000 ICP-MS

Nitric acid is widely used throughout the semiconductor and electronics industry. Various purity grades are required depending on the application and the intended use. For this reason, the semiconductor industry has required ever-lower detection of a broad range of impurities, including non-metal ...

Ultra-Trace Quantification of Non-Metals in Sulfuric Acid Solutions using the NexION 5000 ICP-MS under Different Cell Gas Conditions

As semiconductor manufacturing processes are being performed at increasing micro-levels, the demand for ICP-MS instrumentation capable of analyzing non-metallic elements at ultra-trace concentrations has grown. For these applications, the use of an ICP-MS system with a full-length resolving quadr ...


Application Note

Analysis of Metallic Impurities in Organic Solvents Used in IC Fabrication with the NexION 5000 ICP-MS

The most commonly used organic chemicals in integrated circuit (IC) fabrication are isopropyl alcohol (IPA), propylene glycol methyl ether acetate (PGMEA), propylene glycol methyl ether (PGME), and n-methyl pyrrolidone (NMP). These solvents can leave behind organic film residues with metallic and ...

Analysis of Metallic Impurities in Si Wafers Using Fully Automated VPD-ICP-MS

Silicon (Si) is the most used semiconductor and is a critical element for producing circuits found in everyday electronics. As more industries utilize semiconductor devices and Si wafers in electronic products and services, there is an increasing demand for Si wafers with minimal impurities due t ...

Analysis of Semiconductor-Grade Chemicals Using Automated Standard Addition System (ASAS)-ICP-MS

Semiconductor device fabrication utilizes a variety of chemicals, whose metallic impurity levels must remain at ultra-trace levels to ensure end product quality. Inductively coupled plasma mass spectrometry (ICP-MS) is one of the most sensitive techniques for metallic impurities testing and has b ...

Analysis of Semiconductor-Grade Hydrogen Peroxide Using the NexION 5000 ICP-MS

Contaminants in chemicals used during manufacturing processes have a direct impact on product yield and reliability of semiconductor devices. Within the whole process of integrated circuit manufacturing, wafers are sent for repeated cleaning using hydrogen peroxide (H2O2). S ...

Characterization of Ultrapure Water Using NexION 5000 ICP-MS

For decades, the semiconductor industry has been designing new devices that are smaller, faster and consume less power than their predecessors. To maintain this trend, the critical features of these devices must also become smaller and have fewer defects. The small diameter of a chip’s features r ...

Determination of Impurities in Electronic-Grade Hydrochloric Acid with the NexION 5000 ICP-MS

During the production of semiconductor devices, it is crucial to ensure that the silicon wafers are free of contaminants and impurities. The use of high-purity chemicals during the cleaning process is critical to the semiconductor product’s overall quality and performance. Therefore, it is essent ...

Direct Analysis of Metallic Impurities in Hydrochloric Gas Using Gas Exchange Device (GED) ICP-MS

In today’s fast-paced world, semiconductors have become indispensable. Demands for faster and smaller chips with higher integration and lower energy consumption are increasing. Potential sources of metallic contamination in semiconductor manufacturing processes are ubiquitous, thus it is critical ...

Ultra-Trace Elemental Analysis in High-Purity Sulfuric Acid

The production of electronic devices is a complex process that requires the use of ultra-pure chemicals during the manufacturing steps. High-purity-grade sulfuric acid (H2SO4) is generally used for cleaning components and etching all metal and organic impurities on silicon w ...



Multi-Quadrupole ICP-MS – Pushing Limits of Detection to the Next Decimal

As the limits of detection (LODs) for trace metal analysis are increasingly being pushed to the next decimal, a need exists to meet these new detection requirements without compromising accuracy or precision. Inductively coupled plasma mass spectrometry (ICP-MS) is often the technique of choice f ...

Sigma Analytical Services’ Journey as a Cannabis, Food, and Pharma Startup Laboratory

Newly regulated industries, such as cannabis, must deal with establishing standardized protocols with the prospect of regulations changing quickly and evolving as the industry expands.

When establishing Sigma Analytical Services Inc. in 2017, a new company in a newly regulated industry with ...

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A Complete Portfolio of Grain Testing Solutions

Grains, whether consumed whole or processed, have nutritional and functional requirements and must be safe for consumption, and the only way to ensure grain quality is through rigorous testing. That’s where PerkinElmer come in. Our easy-to-operate, integrated testing and analytical solutions enco ...

Analytical Sustainability Solutions

As the fundamental need to safeguard our environment continues to grow, and economic demand increases to support our growing population, it’s important to explore more sustainable avenues to ensure the long-term health of our planet at the same time as encouraging business and economic growth.

Automotive Materials Analysis Brochure

This brochure guides you through all our PerkinElmer analytical solutions for the automotive industry. From advanced polymers and rubber materials, to batteries, semiconductors, glass, fuels and lubricants. See how we can offer you fully-rounded laboratory solutions along the whole automotive val ...

Comprehensive Forensic Analysis Solutions

This brochure provides a simple guide to the analytical solutions and supporting services we provide for forensics and toxicology laboratories.

We know it's not as simple as it seems in the movies, on television, or in the latest potboiler: forensic science is an exacting science, driven by ...

Comprehensive and Compliant Solutions for Glass Analysis

It’s clear, glass has a variety of uses, from practical to technological to decorative. In particular, float glass is widely used in architecture, automotive, transportation, photovoltaic, and solar industries.

For glass testing labs around the world, we offer highly accurate and tailored ...

In-Depth Battery Component Testing

As the world moves to embrace renewable energy sources and reduce our global CO2 emissions, it will also be more dependent than ever on better battery technology, powering the demands of industries such as automotive, energy storage, and portable consumer goods like power tools, computers, and ph ...

NexION 5000 Multi-Quadrupole ICP-MS - Interactive Brochure

In the fast-paced analytical world, accurate and reproducible results are essential to guaranteeing quality and ensuring safety. What many industries have in common is the need for trace-element analysis with superior interference removal, extremely low detection limits, and outstanding backgroun ...


Case Study

NutriControl and PerkinElmer Collaborate to Serve-up Agricultural and Nutritional Analyses

The science and art of creating and maintaining thriving agricultural ecosystems requires cultivating healthy soil, crops and livestock. The safety and efficacy of agricultural chemicals and their uptake into our food supply requires robust, reliable and effective analytical testing on agrochemic ...

PDF 393 KB


New Developments in Multi-Quadrupole ICP-MS Technology for Challenging Applications

Laboratories conducting trace-elemental analyses require high-performance instrumentation capable of delivering accurate and reproducible results, even at low concentrations. Find out how recent developments in multi-quadrupole ICP-MS technology address these evolving needs.

  • Advantages ...

NexION 5000 Multi-Quadrupole ICP-MS - Digest of Application Spotlights

Welcome to the application digest for PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS.

The multi-award-winning NexION 5000 is the industry’s first and only four-quadrupole ICP-MS system, engineered to remove the most complex interferences and address the most challenging a ...

Palm Oil Analysis. Complete lab solutions from upstream to downstream

Quality control-monitoring and testing are important in ensuring the quality of palm oil. The quality control parameters are used to judge the quality of palm oil products and it can be monitored and tested to ensure that the palm oil is not deliberately or accidentally adulterated.



NexION 5000 ICP-MS – Innovation Recognized

Perfect for your most challenging applications, the cutting-edge, multi-award-winning NexION® 5000 Multi-Quadrupole ICP-MS is the industry’s first and only four-quadrupole ICP-MS instrument – taking performance well beyond everyday triple-quad technology. And the scientific community i ...

PDF 204 KB
Power Up Your Battery Component Analysis Flyer

Download this useful flyer for a summary of how our instrumentation can test for safety, performance and composition of your advanced battery materials. Get an overview of solutions and their benefits in materials characterization techniques from FT-IR, ICP-OES, ICP-MS, DSC, TGA, GC-MS and hyphen ...

PDF 523 KB


Atomic Spectroscopy - A Guide to Selecting the Appropriate Technique and System

Atomic spectroscopy is a family of techniques for determining the elemental composition of an analyte by its electromagnetic or mass spectrum. Several analytical techniques are available:

  • Atomic absorption (AA): flame and graphite furnace
  • Inductively coupled plasma optical emis ...

Battery Analysis Guide

This guide offers an overview of analyses required throughout the battery value chain - learn about innovative analytical solutions for testing every part of the battery, including the anode, cathode, binder, separator, and electrolyte. See the value in data generated from a variety of applicatio ...

NexION 1000/2000/5000 ICP-MS Consumables & Supplies Guide

Look to PerkinElmer for all of your consumables and supplies for your NexION 1000, 2000, or 5000 ICP-MS system.

NexION 5000 ICP-MS Preparing Your Lab

This document provides information to assist in preparing your laboratory for the PerkinElmer NexION® 5000 ICP-MS system prior to instrument delivery and installation.




Advanced Solutions for Solar Cells Poster

Download this poster for an all-in-one view of how PerkinElmer instrumentation can answer the analytical needs of the solar market. From R&D of nanomaterials and advanced materials to solar cell component testing including aging and defect analysis - our UV/Vis, DSC, TGA, FT-IR and ICP systems he ...

Infographic - Solutions for your Toxicology Lab

Infographic Poster showing the range of different analytical solutions for Toxicology Labs; from GC and LC, to ICP-MS and UV-Vis. Benchtop and floor standing chromatography, spectroscopy and thermal solutions for everyday robust and reliable analyses.


PDF 460 KB

Product Note

NexION 5000 Multi-Quadrupole ICP-MS

The NexION® 5000 is a multi-quadrupole-based ICP-MS instrument engineered to remove the most complex interferences, ideal for multi-element analysis applications requiring ultra-trace-level detection. Download this product note to discover all of its innovative features.

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Regulatory Compliance Certification

Product Certificate - Nexion 5000

Product Certificate for the Nexion 5000

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Technical Note

Advantages of a Novel Interface Design for NexION 5000 ICP-MS

The novel design of the second-generation Triple Cone Interface with patent-pending OmniRing was developed specifically for the NexION® 5000 multi-quadrupole ICP-MS with both sensitivity and stability in mind. It builds on the Triple Cone Interface geometry of the ...

Advantages of a Novel Plasma Generator for the NexION 1000/2000/5000 ICP-MS Systems

Unlike other ICP-MS systems on the market that utilize conventional 40-MHz or 27-MHz commercially available generators which are typically customized and modified to work with ICP-MS instruments, the NexION® 1000/2000/5000 ICP-MS systems feature a 34-MHz frequency free-running RF g ...

PDF 986 KB
All Matrix Solution System for NexION ICP-MS Platforms

PerkinElmer’s AMS system provides a number of benefits to simplify analysis of high-matrix samples with theNexION family of ICP-MS instruments. By introducing a flow of argon into the spray chamber neck, the aerosol stream is diluted,allowing for more efficient ionization, fewer matrix effects, a ...

Interferences in ICP-MS: Do we still have to worry about them?

Interferences will always occur in ICP-MS and need to be dealt with. However, the NexION® 5000 multi-quadrupole ICP-MS with quadrupole Universal Cell is able to effectively and reproducibly remove spectral interferences leading to improved accuracy, repeatability and reproducibilit ...

Novel Interference Removal Opportunities with the NexION 5000 ICP-MS

The NexION® 5000 ICP-MS, with multi-quadrupole technology and Universal Cell, is able to take full advantage of element reactivity with 100% pure gases by analyzing them as cluster ions at higher masses where no interferences reside, and the background is clean. The Universal Cell, ...

TotalQuant Analysis in NexION ICP Mass Spectrometers

TotalQuant, a software feature unique to PerkinElmer's NexION® ICP-MS systems, intelligently interprets the complete mass spectrum, providing semi-quantitative to quantitative results for all elements. TotalQuant and survey scan can provide supplementary and confirmatory information ab ...